The Z-Tilt-Torsion (ZTT) precision motion platform is a core component of semiconductor inspection equipment, and its control performance directly affects the yield of semiconductor inspection. Due to the fact that the ZTT precision motion platform is a multi-axis motion platform composed of flexible hinge guides, the nonlinearity and disturbance problems inherent in the system pose challenges to the design of controllers. Therefore, the research on the controller for the ZTT precision motion platform is very important. Currently, the existing controllers mainly include Proportional-Integral-Derivative (PID) control, sliding mode control, and H∞ controller. Among them, when the system is subject to strong external disturbances, the performance of the PID controller will decline, which may even lead to system instability. Although the sliding mode controller can solve the problem of external disturbances, its switching characteristics make it very sensitive to high-frequency noise and measurement errors, which may amplify these disturbances and make it difficult to implement in practical applications. To solve the above problems, this paper adopts the H∞ control method and designs an H∞ controller to make the closed-loop function of the system meet certain H∞ norm constraints, thereby ensuring the stability and performance of the system. Through experimental methods, the effects of PID control and H∞ control were compared. The results show a good suppression effect on external disturbances and could effectively suppress the fluctuations of the motion platform caused by disturbances.