With the rapid development of technology, vibration control in high-precision fields such as semiconductor manufacturing has become increasingly important. Active vibration isolators, as a key vibration control technology, can effectively reduce the impact of external and internal vibrations on equipment performance. However, existing control methods still face limitations when addressing the challenges of high-precision isolation systems, particularly when dealing with direct disturbances caused by the motion platform. This paper proposes a new active vibration isolation scheme that combines drive force feedforward and iterative learning control. By dynamically modeling the isolation platform, the direct disturbances caused by the motion platform are thoroughly analyzed, and a dual strategy based on drive force feedforward compensation and iterative learning control is designed. The feedforward compensation accurately predicts and mitigates part of the disturbances from the motion platform, while iterative learning control iteratively optimizes the compensation strategy, effectively reducing the influence of nonlinear disturbances such as friction and improving the control precision of the system. Experimental results show that the proposed method significantly improves the vibration isolation performance of the system, especially in terms of suppressing nonlinear disturbances.