As the core component of semiconductor equipment, the servo accuracy and active vibration suppression capability of ultra precision motion table directly determine the performance of semiconductor equipment. In response to the problem of vibration caused by the excitation of internal noise due to the dynamic characteristics of the measuring benchmark during high-speed motion of the ultra precision motion table, which leads to an increase in tracking error of the ultra precision motion table in these modes. This article studies an active vibration suppression method based on accelerometer feedforward control. The resonant frequency point is accurately measured using the characteristic of real-time acquisition of acceleration signals of the measured object by the accelerometer. The signal delay is solved by using a phase delay filter, and the vibration signal is effectively attenuated by designing a feedforward controller. Taking laboratory equipment as an example, data processing and simulation verification were carried out using software such as MATLAB, as well as overall performance verification, to confirm the effectiveness, reliability, and feasibility of the active vibration suppression method based on accelerometer feedforward control in solving the problem of poor servo error caused by high-frequency vibration.