It is very important to develop numerical simulation methods in the research and design of micro-electro-mechanical systems.This paper reviewed the present numerical methods for the multiple energy-domain coupling simulation in MEMS.The status quo and the future research trends of this field were discussed.
参考文献
相似文献
引证文献
引用本文
高行山,赵亚博,吕胜利,邓子辰.微机电系统多场耦合仿真分析[J].动力学与控制学报,2004,2(1):70~74; Gao Hangshan, Zhao Yapu, Lu Shengli, Deng Zichen. On the simulation analysis of mixed-energy domain for mems[J]. Journal of Dynamics and Control,2004,2(1):70-74.
